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Applied Physics Letters 80 (13): 2371-2373 (2002)

Growth of (103) fiber-textured SrBi2Nb2O9 films on Pt-coated silicon

G Asayama , J Lettieri , M A Zurbuchen , Y Jia , S Trolier-Mckinstry , D G Schlom , S K Streiffer , J -P Maria , S D Bu , C B Eom
(103) fiber-textured SrBi2Nb2O9 thin films have been grown on Pt-coated Si substrates using a SrRuO3 buffer layer. High-resolution transmission electron microscopy reveals that the fiber texture arises from the local epitaxial growth of (111) SrRuO3 grains on (111) Pt grains and in turn (103) SrBi2Nb2O 9 grains on (111) SrRuO3 grains. The films exhibit remanent polarization values of 9 C/cm2. The uniform grain orientation (fiber texture) should minimize grain-to-grain variations in the remanent polarization, which is important to continued scaling of ferroelectric memory device structures. 2002 American Institute of Physics.
ISSN: 00036951     
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